Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
Deposition of Piezoelectric PZT(53/47) Film by Metalorganic Decomposition for Microelectromechanical Device
J Electr Electron Mater. 1998;11(6):458-464. Published online June 1, 1998
