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Al 합금막의 식각후 CHF3 처리에 의한 부식억제 효과

김창일, 권광호, 윤용선, 백규하, 남기수, 장의구

The Effect of the Snti - corrosion by CHF3 Treatment after Plasma Etching of Al Alloy Films

Chang Il Kim, Kwang Ho Kwon, Yong Sun Yoon, Kyu Ha Baek, Kee Soo Nam, Eui Goo Chang
J Electr Electron Mater 1998;11(7):517-521.
Published online: July 1, 1998
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The Effect of the Snti - corrosion by CHF3 Treatment after Plasma Etching of Al Alloy Films
J Electr Electron Mater. 1998;11(7):517-521.   Published online July 1, 1998
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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The Effect of the Snti - corrosion by CHF3 Treatment after Plasma Etching of Al Alloy Films
J Electr Electron Mater. 1998;11(7):517-521.   Published online July 1, 1998
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