Construction of CVD by using RF Helicon Plasma

Jae Gyun Shin; June Won Hyun; Sang Kyu Park

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RF 헬리콘 플라즈마를 이용한 화학기상 증착기의 제작

신재균, 현준원, 박상규

Construction of CVD by using RF Helicon Plasma

Jae Gyun Shin, June Won Hyun, Sang Kyu Park

J Electr Electron Mater 1998;11(8):607-612.
Published online: August 1, 1998

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Construction of CVD by using RF Helicon Plasma

J Electr Electron Mater. 1998;11(8):607-612. Published online August 1, 1998

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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bib — For JabRef, BibDesk, and other BibTeX-specific software

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Citation and abstract for the content below

Construction of CVD by using RF Helicon Plasma

J Electr Electron Mater. 1998;11(8):607-612. Published online August 1, 1998

Articles

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RF 헬리콘 플라즈마를 이용한 화학기상 증착기의 제작

Construction of CVD by using RF Helicon Plasma

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