Si Micromachining for MEMS - IR Sensor Application

Heung Woo Park; Byeong Kwon Ju; Yun Kwon Park; Jung Ho Park; Chul Ju Kim; S . S . Yom; Sang Hee Suh; Myung Hwan Oh

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결정의존성 식각 / 기판접합을 이용한 MEMS 용 구조물의 제작

박흥우, 주병권, 박윤권, 박정호, 김철주, 염상섭, 서상희, 오명환

Si Micromachining for MEMS - IR Sensor Application

Heung Woo Park, Byeong Kwon Ju, Yun Kwon Park, Jung Ho Park, Chul Ju Kim, S . S . Yom, Sang Hee Suh, Myung Hwan Oh

J Electr Electron Mater 1998;11(10):815-819.
Published online: October 1, 1998

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Si Micromachining for MEMS - IR Sensor Application

J Electr Electron Mater. 1998;11(10):815-819. Published online October 1, 1998

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Si Micromachining for MEMS - IR Sensor Application

J Electr Electron Mater. 1998;11(10):815-819. Published online October 1, 1998

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결정의존성 식각 / 기판접합을 이용한 MEMS 용 구조물의 제작

Si Micromachining for MEMS - IR Sensor Application

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