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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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PECVD SiN 막의 절연파괴특성과 Wearout 현상에 관한 연구

성영권, 이동희, 최복길, 오재하

A Study on the Breadown Characteristic and Wearout Phenomena of PECVD SiN Film

Yung Kwon Sung, Dong Hee Rhie, Bok Gil Choi, Jae Ha Oh
J Electr Electron Mater 1988;1(1):78-85.
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A Study on the Breadown Characteristic and Wearout Phenomena of PECVD SiN Film
J Electr Electron Mater. 1988;1(1):78-85.
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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A Study on the Breadown Characteristic and Wearout Phenomena of PECVD SiN Film
J Electr Electron Mater. 1988;1(1):78-85.
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