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스퍼터된 바나듐 산화막의 구조적 , 광학적 특성에 미치는 기판 온도의 효과

최복길, 최창규, 권광호, 김성진, 이동희

Effect of Substrate Temperature on the Structural and Optical Properties of Sputtered Vanadium Pentoxide Thin Films

Bok Gil Choi, Chang Kyu Choi, Kwang Ho Kwon, Sung Jin Kim, Dong Hee Lee
J Korean Inst Electr Electron Mater Eng 1999;12(6):497-504.
Published online: June 1, 1999
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Effect of Substrate Temperature on the Structural and Optical Properties of Sputtered Vanadium Pentoxide Thin Films
J Korean Inst Electr Electron Mater Eng. 1999;12(6):497-504.   Published online June 1, 1999
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Effect of Substrate Temperature on the Structural and Optical Properties of Sputtered Vanadium Pentoxide Thin Films
J Korean Inst Electr Electron Mater Eng. 1999;12(6):497-504.   Published online June 1, 1999
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