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초전도 자성체 : 할로우 캐소드 스퍼터링에 의한 대면적 고온초전도 박막의 제작에 대한 연구

곽민환, 서정대, 한석길, 강광용, 김상현

Superconductor Magnetic Materials : A Study on the Large Area HTS Thin Film Deposition by Hollow cathods Sputtering

Min Hwan Kwak, Jeong Dae Suh, Suk Kil Han, Kwang Yong Kang, Sang Hyun Kim
J Electr Electron Mater 1999;12(6):550-555.
Published online: June 1, 1999
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Superconductor Magnetic Materials : A Study on the Large Area HTS Thin Film Deposition by Hollow cathods Sputtering
J Electr Electron Mater. 1999;12(6):550-555.   Published online June 1, 1999
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Superconductor Magnetic Materials : A Study on the Large Area HTS Thin Film Deposition by Hollow cathods Sputtering
J Electr Electron Mater. 1999;12(6):550-555.   Published online June 1, 1999
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