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센서 기능성 박막 / DRAM 이용을 위하여 실리콘 웨이퍼 위에 제작된 LB 막의 유전 특성

최창주, 정용호, 이우선, 김태성

The dielectric properties of LB film fabricated on the Silicon wafer for DRAM application

Chang Joo Choi, Yong Ho Chung, Woo Sun Lee, Tae Sung Kim
J Korean Inst Electr Electron Mater Eng 1999;12(10):873-880.
Published online: October 1, 1999
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The dielectric properties of LB film fabricated on the Silicon wafer for DRAM application
J Korean Inst Electr Electron Mater Eng. 1999;12(10):873-880.   Published online October 1, 1999
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The dielectric properties of LB film fabricated on the Silicon wafer for DRAM application
J Korean Inst Electr Electron Mater Eng. 1999;12(10):873-880.   Published online October 1, 1999
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