Improved Electrical Properties of Reoxidized Nitrided Oxide Film Grown by Rapid Thermal Processing

Kwang Sun Yang; Moon Hoi Son; Hoon Soo Park; Bong Ryul Kim

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급속 열처리 방법으로 성장한 재 산화된 질화 산화막의 전기적 특성 향상

양광선, 손문회, 박훈수, 김봉열

Improved Electrical Properties of Reoxidized Nitrided Oxide Film Grown by Rapid Thermal Processing

Kwang Sun Yang, Moon Hoi Son, Hoon Soo Park, Bong Ryul Kim

J Electr Electron Mater 1991;4(2):175-184.

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Improved Electrical Properties of Reoxidized Nitrided Oxide Film Grown by Rapid Thermal Processing

J Electr Electron Mater. 1991;4(2):175-184.

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Improved Electrical Properties of Reoxidized Nitrided Oxide Film Grown by Rapid Thermal Processing

J Electr Electron Mater. 1991;4(2):175-184.

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급속 열처리 방법으로 성장한 재 산화된 질화 산화막의 전기적 특성 향상

Improved Electrical Properties of Reoxidized Nitrided Oxide Film Grown by Rapid Thermal Processing

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