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Rf - magnetron sputtering 방법을 이용한 c - 축 배향된 potassium lithium niobate 박막의 제작

박성근, 백민수, 배승춘, 권성열, 김지현, 김기완

Fabrication of c - axis oriented potassium lithium niobate thin film using an rf - magnetron sputtering method

Sung Kun Park, Min Soo Baek, Seung Choon Bae, Sung Yeol Kwon, Jee Hyun Kim, Ki Wan Kim
J Electr Electron Mater 1999;12(11):1033-1039.
Published online: November 1, 1999
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Fabrication of c - axis oriented potassium lithium niobate thin film using an rf - magnetron sputtering method
J Electr Electron Mater. 1999;12(11):1033-1039.   Published online November 1, 1999
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Fabrication of c - axis oriented potassium lithium niobate thin film using an rf - magnetron sputtering method
J Electr Electron Mater. 1999;12(11):1033-1039.   Published online November 1, 1999
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