The transfer characteristics of amorphous indium gallium zinc oxide thin film transistor (a-IGZO TFT) showed the distortion in the subthreshold region after gate bias stress, in addition to the parallel shift of threshold voltage. The capacitancevoltage (C-V) curve was also deformed from its initial shape after the gate bias stress. This study analyzes both the C-V and transfer curves plotted on the same gate voltage axis in order to investigate the mechanism driving the distortion in the transfer curve. It is deduced that an additional interfacial trap states at the bottom interface of a-IGZO are produced during gate bias stress, thereby they exhibit the back channel effect, which explains the origin of the distortion in the transfer curve and the deformation of C-V curve.
Developing a thin-film transistor with characteristics such as a large area, high mobility, and high reliability are key elements required for the next generation on displays. In this paper, we have investigated the research trends related to improving the reliability of oxide-semiconductor-based thin-film transistors, which are the primary focus of study in the field of optical displays. It has been reported that thermal treatment in a high-pressure oxygen atmosphere reduces the threshold voltage shift from -7.1 V to -1.9 V under NBIS. Additionally, a device with a SiO2/Si3N4 dual-structure has a lower threshold voltage (-0.82 V) under NBIS than a single-gate-insulator-based device (-11.6 V). The dual channel structure with different oxygen partial pressures was also confirmed to have a stable threshold voltage under NBIS. These can be considered for further study to improve the NBIS problem.