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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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비정질 인듐-갈륨-아연 산화물 기반 박막 트랜지스터의 NBIS 불안정성 개선을 위한 연구동향

윤건주, 박진수, 김재민, 조재현, 배상우, 김진석, 김현후, 이준신

Research Trends for Improvement of NBIS Instability in Amorphous In-Ga-ZnO Based Thin-Film Transistors

Geonju Yoon, Jinsu Park, Jaemin Kim, Jaehyun Cho, Sangwoo Bae, Jinseok Kim, Hyun-hoo Kim, Junsin Yi
J Electr Electron Mater 2019;32(5):371-375.
Published online: September 1, 2019
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Developing a thin-film transistor with characteristics such as a large area, high mobility, and high reliability are key elements required for the next generation on displays. In this paper, we have investigated the research trends related to improving the reliability of oxide-semiconductor-based thin-film transistors, which are the primary focus of study in the field of optical displays. It has been reported that thermal treatment in a high-pressure oxygen atmosphere reduces the threshold voltage shift from -7.1 V to -1.9 V under NBIS. Additionally, a device with a SiO2/Si3N4 dual-structure has a lower threshold voltage (-0.82 V) under NBIS than a single-gate-insulator-based device (-11.6 V). The dual channel structure with different oxygen partial pressures was also confirmed to have a stable threshold voltage under NBIS. These can be considered for further study to improve the NBIS problem.

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Research Trends for Improvement of NBIS Instability in Amorphous In-Ga-ZnO Based Thin-Film Transistors
J Electr Electron Mater. 2019;32(5):371-375.   Published online September 1, 2019
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Research Trends for Improvement of NBIS Instability in Amorphous In-Ga-ZnO Based Thin-Film Transistors
J Electr Electron Mater. 2019;32(5):371-375.   Published online September 1, 2019
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