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Colloidal silica
WHERE t1.sid in(parameter_dbtbl_keyword '%Colloidal silica%') and t1.xml_status <> 99
3
results for
"Colloidal silica"
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Keywords
Colloidal silica (2)
Acid Colloidal Silica (1)
Benzotriazole (1)
BTA (1)
Chemical Mechanical Planarization (1)
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Publication year
2007 (1)
2004 (2)
Authors
Ui Gu Jang (1)
Nam Hun Kim (1)
Sang Yong Kim (1)
Tae Hyeong Kim (1)
Yong Jin Seo (1)
Keywords
Colloidal silica (2)
Acid Colloidal Silica (1)
Benzotriazole (1)
BTA (1)
Chemical Mechanical Planarization (1)
Citric acid (1)
Coating material (1)
Copper (1)
Copper CMP (1)
Hydrogen peroxide (1)
Methyltrimethoxysilane (1)
Semi Abrasive Free Slurry (1)
Sol-gel (1)
Uniformity (1)
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authors
Ui Gu Jang (1)
Nam Hun Kim (1)
Sang Yong Kim (1)
Tae Hyeong Kim (1)
Yong Jin Seo (1)
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Publication Year
2007 (1)
2004 (2)
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"Colloidal silica"
Mechanical Analysis on Uniformity in Copper Chemical Mechanical Planarization
J Electr Electron Mater
2007;20(1):74-79.
Published online January 1, 2007
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Properties of Sol-gel Coating Materials Synthesized from Colloidal Silicas and Methyltrimethoxysilane
J Electr Electron Mater
2004;17(9):967-972.
Published online September 1, 2004
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A Study on Semi Abrasive Free Slurry including Acid Colloidal Silica for Copper Chemical Mechanical Planarization
Nam Hun Kim, Sang Yong Kim, Yong Jin Seo, Tae Hyeong Kim, Ui Gu Jang
J Electr Electron Mater
2004;17(3):272-277.
Published online March 1, 2004
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