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"Compound semiconductor"

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"Compound semiconductor"

RTA Effect on Transport Characteristics in Al0.25Ga0.75As/In0.2Ga0.8As pHEMT Epitaxial Structures Grown by Molecular Beam Epitaxy
J Electr Electron Mater 2006;19(7):605-610.   Published online July 1, 2006
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High Density Inductively Coupled Plasma Etching of 3-5 Semiconductors in BCI3/Ne Chemistry
In Gyu Baeg, Wan Tae Im, Je Won Lee, Gwan Sig Jo
J Electr Electron Mater 2003;16(12s):1187-1194.
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