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"Dual ion-implantation"

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"Dual ion-implantation"

The Research on Trench Etched Field Ring with Dual Ion-Implantation for Power Devices
Sung Min Yang, Ju Hyun Oh, Young Seok Bae, Man Young Sung
J Electr Electron Mater 2010;23(5):364-367.   Published online May 1, 2010
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