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"Electron density"

High Voltage Engineering : Electrical and Optical Characteristics of Inductively Coupled Plasma by Ar Gas Pressure and RF Power
Yong Seong Choe, In Seong Heo, Yeong Hwan Lee, Dae Hui Park
J Korean Inst Electr Electron Mater Eng 2004;17(5):560-566.   Published online May 1, 2004
DOI: https://doi.org/10.4313/JKEM.2004.17.5.560
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