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Ar 가스 압력과 RF 전력에 따른 유도결합형 플라즈마의 전기적 및 광학적 특성

최용성, 허인성, 이영환, 박대희

High Voltage Engineering : Electrical and Optical Characteristics of Inductively Coupled Plasma by Ar Gas Pressure and RF Power

Yong Seong Choe, In Seong Heo, Yeong Hwan Lee, Dae Hui Park
J Electr Electron Mater 2004;17(5):560-566.
Published online: May 1, 2004
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High Voltage Engineering : Electrical and Optical Characteristics of Inductively Coupled Plasma by Ar Gas Pressure and RF Power
J Electr Electron Mater. 2004;17(5):560-566.   Published online May 1, 2004
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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High Voltage Engineering : Electrical and Optical Characteristics of Inductively Coupled Plasma by Ar Gas Pressure and RF Power
J Electr Electron Mater. 2004;17(5):560-566.   Published online May 1, 2004
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