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Equivalent oxide thickness
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"Equivalent oxide thickness"
Temperature Dependence on Electrical Characterization of Epitaxially Grown AlN Film on 6H-SiC Structures
J Korean Inst Electr Electron Mater Eng
2006;19(1):18-22.
Published online January 1, 2006
DOI:
https://doi.org/10.4313/JKEM.2006.19.1.018
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