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6H-SiC 위에 형성한 에피택시 AlN 박막 구조에 대한 전기적 특성의 평가온도 의존성

김용성, 김광호

Temperature Dependence on Electrical Characterization of Epitaxially Grown AlN Film on 6H-SiC Structures

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J Electr Electron Mater 2006;19(1):18-22.
Published online: January 1, 2006
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Temperature Dependence on Electrical Characterization of Epitaxially Grown AlN Film on 6H-SiC Structures
J Electr Electron Mater. 2006;19(1):18-22.   Published online January 1, 2006
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Temperature Dependence on Electrical Characterization of Epitaxially Grown AlN Film on 6H-SiC Structures
J Electr Electron Mater. 2006;19(1):18-22.   Published online January 1, 2006
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