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HBr gas
WHERE t1.sid in(parameter_dbtbl_keyword '%HBr gas%') and t1.xml_status <> 99
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"HBr gas"
Dry Etching of Polysilicon in HBr/O2 Inductively Coupled Plasmas
Seong Jin Beom, O Seong Song, Hye Seong Lee, Jong Jun Kim
J Korean Inst Electr Electron Mater Eng
2004;17(1):1-6.
Published online January 1, 2004
DOI:
https://doi.org/10.4313/JKEM.2004.17.1.001
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Citations
Citations to this article as recorded by
Parameters and Composition of Plasma in a Mixture of HBr + O2: Model Adjustment and Comparison with Experiment
M. V. Tsepkin, A. M. Efremov, V. B. Betelin, K.-H. Kwon
Russian Microelectronics.2026; 55(1): 1.
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