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HBr gas
WHERE t1.sid in(parameter_dbtbl_keyword '%HBr gas%') and t1.xml_status <> 99
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Jong Jun Kim (1)
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O Seong Song (1)
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"HBr gas"
Dry Etching of Polysilicon in HBr/O2 Inductively Coupled Plasmas
Seong Jin Beom, O Seong Song, Hye Seong Lee, Jong Jun Kim
J Electr Electron Mater
2004;17(1):1-6.
Published online January 1, 2004
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