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High dose
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Sang Yong Kim (1)
Chang Jun Park (1)
Yong Jin Seo (1)
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"High dose"
Stabilization of Modified Deceleration Mode for Improvement of Low-energy Ion implantation Process
Yong Jin Seo, Chang Jun Park, Sang Yong Kim
J Electr Electron Mater
2003;16(3):175-180.
Published online March 1, 2003
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