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"Impurity"

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"Impurity"

Raman Characteristics of (100) β-Gallium Oxide Single Crystal Grown by EFG Method
Yun-ji Shin, Seong-ho Cho, Woon-hyeon Jeong, Seong-min Jeong, Won-jae Lee, Si-young Bae
J Electr Electron Mater 2022;35(6):626-630.   Published online November 1, 2022
DOI: https://doi.org/10.4313/JKEM.2022.35.6.13
A 100 mm × 50 mm-sized (100) gallium oxide (Ga2O3) single crystal ingot was successfully grown by edge-defined film-fed growth (EFG). The preferred orientation and the quality of grown Ga2O3 ingot were compatible with a commercial Ga2O3 substrate by showing strong (100) orientation behaviors and 246 arcsec in X-ray rocking curve. Raman characterization was also performed for both samples; thereby providing various Raman-active characteristics of Ga2O3 crystals. In particular, we observed Ag(5) and Ag(10) peaks of Raman active mode, directly related to the impurity of the grown Ga2O3 crystal. Hence, the comparison of the crystal quality and Raman analysis might be useful for further enhancement of Ga2O3 single crystal quality in the future.
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Analysis and Reduction of Impurity Contamination Induced by Plasma Etching on Si Surface
J Electr Electron Mater 2006;19(12):1078-1084.   Published online December 1, 2006
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Switching Characteristics due to the Impurity Concentration and the Channel Length in Lateral MOS-controlled Thyristor
J Electr Electron Mater 2005;18(1):17-23.   Published online January 1, 2005
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Characteristics of Anode Current due to the Impurity Concentration and the Channel Length of Lateral MOS-controlled Thyristor
J Electr Electron Mater 2004;17(10):1034-1040.   Published online October 1, 2004
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Fabrication of 6H-SiC MOSFET and Digital IC
Chung W. Oh, Jae S. Choi, Ji H. Song, Jang H. Lee, Hyung G. Lee, Keun H. Park, Yeong S. Kim
J Electr Electron Mater 2003;16(7):584-592.   Published online July 1, 2003
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