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In-situ doped
WHERE t1.sid in(parameter_dbtbl_keyword '%In-situ doped%') and t1.xml_status <> 99
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"In-situ doped"
Study on P-type in-situ doped Polysilicon Films
Jung Sup Oh, Sang Eun Lee, Jin Tae Noh, Sang Woo Lee, Kyoung Sung Bae, Yong Han Roh
J Electr Electron Mater
2008;21(3):208-212.
Published online March 1, 2008
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