Study on P-type in-situ doped Polysilicon Films

Jung Sup Oh; Sang Eun Lee; Jin Tae Noh; Sang Woo Lee; Kyoung Sung Bae; Yong Han Roh

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반도체 : P형 in-situ 도핑 폴리실리콘 막질에 관한 연구

오정섭, 이상은, 노진태, 이상우, 배경성, 노용한

Study on P-type in-situ doped Polysilicon Films

Jung Sup Oh, Sang Eun Lee, Jin Tae Noh, Sang Woo Lee, Kyoung Sung Bae, Yong Han Roh

J Electr Electron Mater 2008;21(3):208-212.
Published online: March 1, 2008

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Keywords: P-type, In-situ doped, Polysilicon, Work function

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Study on P-type in-situ doped Polysilicon Films

J Electr Electron Mater. 2008;21(3):208-212. Published online March 1, 2008

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Study on P-type in-situ doped Polysilicon Films

J Electr Electron Mater. 2008;21(3):208-212. Published online March 1, 2008

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반도체 : P형 in-situ 도핑 폴리실리콘 막질에 관한 연구

Study on P-type in-situ doped Polysilicon Films

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