Skip to main navigation
Skip to main content
KIEEME
mobile search button
mobile menu button
Search
Advanced Search
ABOUT
ABOUT
Journal introduction
Aims and scope
Editorial board
Management team
Best practice
Subscription information
Contact us
BROWSE ARTICLES
All issues
Current issue
Most viewed
Most downloaded
Most cited
Search
Metrics
EDITORIAL POLICIES
Research ethics
Peer review policy
Copyright and open access policy
Article sharing policy
Archiving policy
Data sharing policy
Preprint policy
Crossmark policy
Advertising and sponsorship policy
Research misconduct-related regulations
FOR CONTRIBUTORS
Instructions for authors
Checklist
Copyright transfer agreement
Graphical abstract
E-SUBMISSION
ABOUT
Journal introduction
Aims and scope
Editorial board
Management team
Best practice
Subscription information
Contact us
BROWSE ARTICLES
All issues
Current issue
Most viewed
Most downloaded
Most cited
Search
Metrics
EDITORIAL POLICIES
Research ethics
Peer review policy
Copyright and open access policy
Article sharing policy
Archiving policy
Data sharing policy
Preprint policy
Crossmark policy
Advertising and sponsorship policy
Research misconduct-related regulations
FOR CONTRIBUTORS
Instructions for authors
Checklist
Copyright transfer agreement
Graphical abstract
Page Path
HOME
Search
Low energy
WHERE t1.sid in(parameter_dbtbl_keyword '%Low energy%') and t1.xml_status <> 99
1
results for
"Low energy"
Filter
Keywords
Deceleration mode (1)
Drift mode (1)
High dose (1)
Ion implantation (1)
Low energy (1)
Publication year
2003 (1)
Authors
Sang Yong Kim (1)
Chang Jun Park (1)
Yong Jin Seo (1)
Keywords
Deceleration mode (1)
Drift mode (1)
High dose (1)
Ion implantation (1)
Low energy (1)
Cancel
Close
authors
Sang Yong Kim (1)
Chang Jun Park (1)
Yong Jin Seo (1)
Cancel
Close
Publication Year
2003 (1)
Cancel
Close
Funded articles
Cancel
Close
"Low energy"
Stabilization of Modified Deceleration Mode for Improvement of Low-energy Ion implantation Process
Yong Jin Seo, Chang Jun Park, Sang Yong Kim
J Electr Electron Mater
2003;16(3):175-180.
Published online March 1, 2003
PDF
5
View
0
Download
First
Prev
Page
of 1
Next
Last
×
TOP
First
Prev
