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"Low energy"

Stabilization of Modified Deceleration Mode for Improvement of Low-energy Ion implantation Process
Yong Jin Seo, Chang Jun Park, Sang Yong Kim
J Korean Inst Electr Electron Mater Eng 2003;16(3):175-180.   Published online March 1, 2003
DOI: https://doi.org/10.4313/JKEM.2003.16.3.175
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