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MS pad
WHERE t1.sid in(parameter_dbtbl_keyword '%MS pad%') and t1.xml_status <> 99
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"MS pad"
Development of Microstructure Pad and Its Performances in STI CMP
Suk Hoon Jeong, Jae Woo Jung, Ki Hyun Park, Heon Deok Seo, Jae Hong Park, Boum Young Park, Suk Bae Joo, Jae Young Choi, Hae Do Jeong
J Electr Electron Mater
2008;21(3):203-207.
Published online March 1, 2008
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