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Metal Gate
WHERE t1.sid in(parameter_dbtbl_keyword '%Metal Gate%') and t1.xml_status <> 99
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"Metal Gate"
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Metal Gate (3)
Mo (2)
Work-function (2)
Composition (1)
Gate-injection (1)
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2005 (2)
2004 (1)
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Sin Nam Hong (1)
Chung Geun Lee (1)
Yeong Jin No (1)
Keywords
Metal Gate (3)
Mo (2)
Work-function (2)
Composition (1)
Gate-injection (1)
High-k (1)
Sheet resistance (1)
Sputtering Power (1)
Ta-Mo alloy (1)
ZrO2 (1)
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2004 (1)
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"Metal Gate"
Analysis of PMOS Capacitor with Thermally Robust Molybdenium Gate
J Electr Electron Mater
2005;18(7):594-599.
Published online July 1, 2005
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Characteristics of Mo Gate Electrode Deposited on ZrO2 Gate Insulator
J Electr Electron Mater
2005;18(2):120-124.
Published online February 1, 2005
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Thermal Stability of Ta-Mo Alloy Film on Silicon Dioxide
Yeong Jin No, Chung Geun Lee, Sin Nam Hong
J Electr Electron Mater
2004;17(4):361-366.
Published online April 1, 2004
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