Thermal Stability of Ta-Mo Alloy Film on Silicon Dioxide

Yeong Jin No; Chung Geun Lee; Sin Nam Hong

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실리콘 산화막에 대한 Ta-Mo 합금 게이트의 열적 안정성

노영진, 이충근, 홍신남

Thermal Stability of Ta-Mo Alloy Film on Silicon Dioxide

Yeong Jin No, Chung Geun Lee, Sin Nam Hong

J Electr Electron Mater 2004;17(4):361-366.
Published online: April 1, 2004

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Keywords: Work-function, Metal Gate, Sputtering Power, Composition, Ta-Mo alloy

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Thermal Stability of Ta-Mo Alloy Film on Silicon Dioxide

J Electr Electron Mater. 2004;17(4):361-366. Published online April 1, 2004

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Thermal Stability of Ta-Mo Alloy Film on Silicon Dioxide

J Electr Electron Mater. 2004;17(4):361-366. Published online April 1, 2004

Articles

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실리콘 산화막에 대한 Ta-Mo 합금 게이트의 열적 안정성

Thermal Stability of Ta-Mo Alloy Film on Silicon Dioxide

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