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"PST"

Etch Characteristics of (Pb,Sr)TiO3 Thin Films using Inductively Coupled Plasma
Gwan Ha Kim, Kyoung Tae Kim, Dong Pyo Kim, Chang Il Kim
J Korean Inst Electr Electron Mater Eng 2003;16(4):286-291.   Published online April 1, 2003
DOI: https://doi.org/10.4313/JKEM.2003.16.4.286
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