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Rf magnetron sputter method
WHERE t1.sid in(parameter_dbtbl_keyword '%Rf magnetron sputter method%') and t1.xml_status <> 99
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Annealing atmosphere (1)
Coercive field (1)
Rf magnetron sputter method (1)
SBT (1)
Thin films (1)
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2003 (1)
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Choon Nam Cho (1)
Woon Shik Choi (1)
Jin Woong Hong (1)
Jin Sa Kim (1)
Chung Hyeok Kim (1)
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Chung Hyeok Kim (1)
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Cheol Gi Shin (1)
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"Rf magnetron sputter method"
Electrical Properties of SBT Capacitors with various Annealing Atmosphere
Choon Nam Cho, Jin Sa Kim, Cheol Gi Shin, Woon Shik Choi, Chung Hyeok Kim, Jin Woong Hong, Joon Ung Lee
J Electr Electron Mater
2003;16(3):207-213.
Published online March 1, 2003
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