Electrical Properties of SBT Capacitors with various Annealing Atmosphere

Choon Nam Cho; Jin Sa Kim; Cheol Gi Shin; Woon Shik Choi; Chung Hyeok Kim; Jin Woong Hong; Joon Ung Lee

doi:10.4313/JKEM.2003.16.3.207

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다양한 열처리 분위기에 따른 SBT 커패시터의 전기적 특성

조춘남, 김진사, 신철기, 최운식, 김충혁, 홍진웅, 이준웅

Electrical Properties of SBT Capacitors with various Annealing Atmosphere

Choon Nam Cho, Jin Sa Kim, Cheol Gi Shin, Woon Shik Choi, Chung Hyeok Kim, Jin Woong Hong, Joon Ung Lee

J Korean Inst Electr Electron Mater Eng 2003;16(3):207-213.
Published online: March 1, 2003

DOI: https://doi.org/10.4313/JKEM.2003.16.3.207

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Keywords: Rf magnetron sputter method, SBT, Thin films, Coercive field, Annealing atmosphere

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Electrical Properties of SBT Capacitors with various Annealing Atmosphere

J Korean Inst Electr Electron Mater Eng. 2003;16(3):207-213. Published online March 1, 2003

DOI: https://doi.org/10.4313/JKEM.2003.16.3.207

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Electrical Properties of SBT Capacitors with various Annealing Atmosphere

J Korean Inst Electr Electron Mater Eng. 2003;16(3):207-213. Published online March 1, 2003

DOI: https://doi.org/10.4313/JKEM.2003.16.3.207

Articles

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다양한 열처리 분위기에 따른 SBT 커패시터의 전기적 특성

Electrical Properties of SBT Capacitors with various Annealing Atmosphere

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