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SiGe oxidation
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2005 (1)
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"SiGe oxidation"
Effect of Ge Redistribution and Interdiffusion during Si(1-x)Gex Layer Dry Oxidation
J Korean Inst Electr Electron Mater Eng
2005;18(12):1080-1086.
Published online December 1, 2005
DOI:
https://doi.org/10.4313/JKEM.2005.18.12.1080
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