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Slurry Usage
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Sang Yong Kim (1)
Nam Hoon Kim (1)
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"Slurry Usage"
Application of Herd Porous Pad in Metal CMP Process
Sang Yong Kim, Nam Hoon Kim, In Pyo Kim, Eui Goo Chang
J Electr Electron Mater
2003;16(5):385-389.
Published online May 1, 2003
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