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"Stamp"

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"Stamp"

Enhanced Electrical Stability of MoS₂ FETs with Sb₂Te₃ vdW Contacts via h-BN Encapsulation
Eun Bi Lee, Se Hee Lim, Jae Mo Yun, Yoon Kyeung Lee
J Electr Electron Mater 2026;39(2):217-223.
Published online March 1, 2026
DOI: https://doi.org/10.4313/JEEM.2026.39.2.12
MoS₂ has attracted significant attention as a next-generation semiconductor material to overcome the physical scaling limits of silicon-based devices due to its atomic thinness and excellent electrical properties. However, high contact resistance and the formation of Schottky barriers resulting from interface defects during the metal deposition process remain major bottlenecks that degrade overall device performance and reliability. In this study, we fabricated MoS₂ FETs by employing Sb₂Te₃, van der Waals (vdW) contacts. Minimized interface inhomogeneity was achieved through a hemispherical stamp-based dry transfer of h-BN for device encapsulation. h-BN encapsulation decreased the hysteresis window in the ±25 V gate voltage range from 17 V to 11.5 V compared to un-capped devices, confirming that charge trapping phenomena induced by external environmental factors were suppressed. Consequently, the dry transfer technique of h-BN using a hemispherical stamp demonstrated in this study provides a potential solution for securing the long-term reliability of MoS₂ devices with vdW contact by minimizing interface contamination.
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Improved Defect Control Problem using Scaled Down Silicon Oxide Stamps for Nanoimprint Lithography
J Electr Electron Mater 2006;19(2):130-138.   Published online February 1, 2006
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