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나노임프린트 리소그래피를 위한 스케일 다운된 산화막 스탬프 제작과 패턴결함 개선에 관한 연구

박형석, 최우범, 성만영

Improved Defect Control Problem using Scaled Down Silicon Oxide Stamps for Nanoimprint Lithography

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J Electr Electron Mater 2006;19(2):130-138.
Published online: February 1, 2006
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Improved Defect Control Problem using Scaled Down Silicon Oxide Stamps for Nanoimprint Lithography
J Electr Electron Mater. 2006;19(2):130-138.   Published online February 1, 2006
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Improved Defect Control Problem using Scaled Down Silicon Oxide Stamps for Nanoimprint Lithography
J Electr Electron Mater. 2006;19(2):130-138.   Published online February 1, 2006
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