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Thermal decomposition method
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Adsorption method (1)
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Thermal decomposition method (1)
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Jung Kwan Lim (1)
Yong Pil Park (1)
Gyung Yong Song (1)
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"Thermal decomposition method"
Construction and Evaluation of Oxidation System for Superconductor Thin Film
Jung Kwan Lim, Yong Pil Park, Gyung Yong Song
J Electr Electron Mater
2003;16(2):163-167.
Published online February 1, 2003
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