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"Thermal probe array"

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"Thermal probe array"

Fabrication and Characterization of 32×32 Silicon Cantilever Array using MEMS Process
J Korean Inst Electr Electron Mater Eng 2006;19(10):894-900.   Published online October 1, 2006
DOI: https://doi.org/10.4313/JKEM.2006.19.10.894
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Fabrication and Characterization of Thermal Probe Array on SOI Substrates
J Korean Inst Electr Electron Mater Eng 2005;18(11):990-995.   Published online November 1, 2005
DOI: https://doi.org/10.4313/JKEM.2005.18.11.990
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