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Within wafer non-uniformity
WHERE t1.sid in(parameter_dbtbl_keyword '%Within wafer non-uniformity%') and t1.xml_status <> 99
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"Within wafer non-uniformity"
Effect of Pad Surface Characteristics on Within Wafer Non-uniformity in CMP
J Korean Inst Electr Electron Mater Eng
2006;19(4):309-313.
Published online April 1, 2006
DOI:
https://doi.org/10.4313/JKEM.2006.19.4.309
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A Study on the Within Wafer Non-uniformity of Oxide Film in CMP
J Korean Inst Electr Electron Mater Eng
2005;18(6):521-526.
Published online June 1, 2005
DOI:
https://doi.org/10.4313/JKEM.2005.18.6.521
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