In this work, we fabricated oxide on an n-type silicon substrate through local anodic oxidation (LAO) using atomic force microscopy (AFM). The resulting oxide thickness was measured and its correlation with load force, scan speed and applied voltage was analyzed. The surface oxide layer was stripped using a buffered oxide etch. Ohmic contacts were created by applying silver paste on the silicon substrate back face. LAO was performed at approximately 70% humidity. The oxide thickness increased with increasing the load force, the voltage, and reducing the scan speed. We confirmed that LAO/AFM can be used to create both lateral and, to some extent, vertical shapes and patterns, as previously shown in the literature.

In this study, we performed the deposition of Al thin film using a DC magnetron sputtering method. To evaluate electrical and structural properties, the growth conditions were changed in terms of two functions, namely, sputtering power ranging from 41.6 to 216 W and film growth rate ranging from 5.35 to 26.39 nm/min. The growth rate and the microstructure were characterized by a scanning electron microscopy and X-ray diffraction analysis. The plane of crystalline growth showed that the preferential (111) direction and defects due to the grain boundary increased with DC power. The resistivity of the Al film over 50 nm showed a constant value by horizontal grain growth. Our results can be applicable for the preparation of nano-templates for anodic aluminum oxide.

In this study, the application of biosensor having a large surface area for more effective and AAO (anomic aluminium oxide) template in order to gain concentration and voltage of anodizing process morphology changes to the control of experiments were conducted. The biosensor surface may increase the response characteristics by having a large surface area. So the entrance to a little more efficient wide depth sensing experiment was carried out to obtain a structure body with a branch shape with a large surface area with increasing. Experimental results from the FE-SEM observation was obtained template morphology. As a result, depending on the anodizing time, the depth of the layer of aluminum oxide was found that it was confirmed that the deepening of the pore size changes according to anodizing condition. And measuring the detection performance according to the conditions in the electrolyte and the reaction because of blood using a biosensor measuring sensing property according to the depth of the pore depth is considered that does not have a significant impact.

Anodic aluminum oxides (AAO) fabricated by the two-step anodizing process have attracted much attention for the fabrication of nano template because of pore structure with high aspect ratio, low cost process and ease of fabrication. AAOs are characterized by a homogeneous morphology of parallelpores that grow perpendicular to the template surface with a narrow distribution of diameter, length and inter-pores spacing, all of which can be easily controlled by suitably choosing of the anodizingparameters such as pH of the electrolyte, anodizing voltage and duration of anodizing. In this study, AAOtemplates were characterized by X-ray diffraction and field-emission scanning electron microscope(FE-SEM). The dependence of the pore size change according to the amount of addition of phosphoric acid, which was used to remove the initial alumina oxide layer, was not observed.

In this study, we fabricated anodic aluminum oxide (AAO) membrane by two step anodizing process for pH detection. The structural properties were observed by X-ray diffraction (XRD) and field emission scanning electron microscope (FE-SEM). Electrochemical measurements of the pH sensor have been performed in capacitance-voltage (C-V) and drift rates. The characterization of AAO membrane exhibited high sensitivity (99.1 mV/pH) at second anodizing time of 4 min.이 논문에 참고문헌이 0건 있습니다.

Abstract: Nanoporous titanium dioxide (TiO(2)) is very attractive material for various applications due to the high surface to volume ratio. In this study, we have fabricated nanoporous TiO(2) thin films on Si by anodic oxidation. 500-nm-thick titanium (Ti) films were deposited on Si by using electron beam evaporation. Nanoporous structures in the Ti films were obtained by anodic oxidization using ethylene glycol electrolytes containing 0.3 wt% NH(4)F and 2 vol% H(2)O under an applied bias of 5 V. The diameter of nanopores in the Ti films linearly increased with anodization time and the whole Ti layer could become nanoporous after anodizing for 3 hours, resulting in vertically aligned nanotubes with the length of 200～ 300 nm and the diameter of 50～80 nm. Upon annealing at 600℃ in air, the anodized Ti films were fully crystallized to TiO(2) of rutile and anatase phases. We believe that our method to fabricate nanoporous TiO(2) films on Si is promising for applications to thin-film gas sensors and thin-film photovoltaics.