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박막 알루미늄을 이용한 규칙적으로 정렬된 나노급 미세기공 어레이 제조기술 개발

이재홍, 김창교

Development of Fabrication Technique of Highly Ordered Nano-sized Pore Arrays using Thin Film Aluminum

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J Electr Electron Mater 2005;18(8):708-713.
Published online: August 1, 2005
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Development of Fabrication Technique of Highly Ordered Nano-sized Pore Arrays using Thin Film Aluminum
J Electr Electron Mater. 2005;18(8):708-713.   Published online August 1, 2005
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Development of Fabrication Technique of Highly Ordered Nano-sized Pore Arrays using Thin Film Aluminum
J Electr Electron Mater. 2005;18(8):708-713.   Published online August 1, 2005
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