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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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"cleaning system"

ITO Wet Etch Properties in an In-Line Wet Etch,Cleaning System by using an Alternating Movement of Substrate
Sung Jae Hong, Sang Jik Kwon, Eou Sik Cho
J Electr Electron Mater 2008;21(8):715-718.   Published online August 1, 2008
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