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반도체 / 13-2-1 : 감압화학증착의 이단계 성장으로 실리콘 기판위에 증착한 in-situ 인 도핑 다결정 실리콘 박막의 미세구조 조절

김홍승, 심규환, 이승윤, 이정용, 강진영

Manipulation of Microstructure of In-situ Phosphotus - Doped Poly Silicon Films Deposited on Silicon Substrate Using Two Step Growth of Reduced Pressure Chemical Vapor Deposition

Hong Seung Kim, Kyu Hwan Shim, Seung Yun Lee, Jeong Yong Lee, Jin Young Kang
J Electr Electron Mater 2000;13(2):95-100.
Published online: February 1, 2000
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Manipulation of Microstructure of In-situ Phosphotus - Doped Poly Silicon Films Deposited on Silicon Substrate Using Two Step Growth of Reduced Pressure Chemical Vapor Deposition
J Electr Electron Mater. 2000;13(2):95-100.   Published online February 1, 2000
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Manipulation of Microstructure of In-situ Phosphotus - Doped Poly Silicon Films Deposited on Silicon Substrate Using Two Step Growth of Reduced Pressure Chemical Vapor Deposition
J Electr Electron Mater. 2000;13(2):95-100.   Published online February 1, 2000
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