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반도체 / 비정질 Se75Ge25 박막의 Ga+ 소스를 사용한 FIB 입사에 따른 이온농도 분포에 관한 연구

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A study on the ion - concentration distribution using by FIB irradiated on amorphous Se75Ge25 Thin film

Ki Joo Lim, Hyun Yong Lee, Hong Bay Chung
J Electr Electron Mater 2000;13(3):193-199.
Published online: March 1, 2000
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A study on the ion - concentration distribution using by FIB irradiated on amorphous Se75Ge25 Thin film
J Electr Electron Mater. 2000;13(3):193-199.   Published online March 1, 2000
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
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A study on the ion - concentration distribution using by FIB irradiated on amorphous Se75Ge25 Thin film
J Electr Electron Mater. 2000;13(3):193-199.   Published online March 1, 2000
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