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반도체 / 고밀도 플라즈마에 의한 PZT 박막의 식각특성 연구

안태현, 서용진, 김창일, 장의구

Studies on the etching characteristics of PZT thin films using inductively coupled plasma

Tae Hyun An, Yong Jin Seo, Chang Il Kim, Eui Goo Chang
J Electr Electron Mater 2000;13(3):188-192.
Published online: March 1, 2000
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Studies on the etching characteristics of PZT thin films using inductively coupled plasma
J Electr Electron Mater. 2000;13(3):188-192.   Published online March 1, 2000
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Studies on the etching characteristics of PZT thin films using inductively coupled plasma
J Electr Electron Mater. 2000;13(3):188-192.   Published online March 1, 2000
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