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센서 기능박막 / 전기화학적 식각정지에 의한 SDB SOI 기판의 제작

정귀상, 강경두

The Fabrication of a SDB SOI Substrate by Electrochemical Etch - stop

Gwiy Sang Chung, Kyung Doo Kang
J Electr Electron Mater 2000;13(5):431-436.
Published online: May 1, 2000
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The Fabrication of a SDB SOI Substrate by Electrochemical Etch - stop
J Electr Electron Mater. 2000;13(5):431-436.   Published online May 1, 2000
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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The Fabrication of a SDB SOI Substrate by Electrochemical Etch - stop
J Electr Electron Mater. 2000;13(5):431-436.   Published online May 1, 2000
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