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실리콘 기판위에 플라즈마 분자선 에피택시를 이용하요 성장된 질화알루미늄 박막의 특성분석

홍성의, 한기평, 백문철, 조경익, 윤순길

Characterization of AIN Thin Films Grown by Plasma Assisted Molecular Beam Epitaxy on Si Substrate

Sung Ui Hong, Gee Pyeong Han, Mun Chel Paek, Kyung Ik Cho, Soon Gil Yoon
J Korean Inst Electr Electron Mater Eng 2000;13(10):828-833.
Published online: October 1, 2000
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Characterization of AIN Thin Films Grown by Plasma Assisted Molecular Beam Epitaxy on Si Substrate
J Korean Inst Electr Electron Mater Eng. 2000;13(10):828-833.   Published online October 1, 2000
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Characterization of AIN Thin Films Grown by Plasma Assisted Molecular Beam Epitaxy on Si Substrate
J Korean Inst Electr Electron Mater Eng. 2000;13(10):828-833.   Published online October 1, 2000
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