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극미세 광 및 유체 제어를 위한 마이크로엑추에이터

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J Electr Electron Mater 2001;14(2):8-18.
Published online: February 1, 2001
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J Electr Electron Mater. 2001;14(2):8-18.   Published online February 1, 2001
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J Electr Electron Mater. 2001;14(2):8-18.   Published online February 1, 2001
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