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센서 , 기능성박막 : 비정질 기판위에 증착한 KLN 박막의 기판온도에 의한 영향

박성근, 최병진, 홍영호, 전병억, 김진수, 백민수

Influence of Substrate Temperature of KLN Thin Film Deposited on Amorphous Substrate

Sung Kun Park, Byung Jin Choi, Young Ho Hong, Byeong Eok Jun, Jin Soo Kim, Min Soo Baek
J Korean Inst Electr Electron Mater Eng 2001;14(1):34-42.
Published online: January 1, 2001
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Influence of Substrate Temperature of KLN Thin Film Deposited on Amorphous Substrate
J Korean Inst Electr Electron Mater Eng. 2001;14(1):34-42.   Published online January 1, 2001
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Influence of Substrate Temperature of KLN Thin Film Deposited on Amorphous Substrate
J Korean Inst Electr Electron Mater Eng. 2001;14(1):34-42.   Published online January 1, 2001
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