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센서 , 기능성박막 : 플라즈마 중합법에 의한 헥사메틸디실록산 박막의 전기적 특성

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Electrical Properties of Plasma Polymerized Hexamethyldisiloxane Thin Film

Sang Hee Lee, Duck Chool Lee
J Electr Electron Mater 2001;14(1):43-47.
Published online: January 1, 2001
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Electrical Properties of Plasma Polymerized Hexamethyldisiloxane Thin Film
J Electr Electron Mater. 2001;14(1):43-47.   Published online January 1, 2001
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Electrical Properties of Plasma Polymerized Hexamethyldisiloxane Thin Film
J Electr Electron Mater. 2001;14(1):43-47.   Published online January 1, 2001
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