Fabrication of Metal Thin - Film Pressure Sensor and Its Characteristics

Gwiy Sang Chung; Sung Kyu Choi; Hoy Duck Nam; Won Jae Lee; Jae Sung Song

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센서 , 기능성박막 : 금속박막형 압력센서의 제작과 그 특성

정귀상, 최성규, 남효덕, 이원재, 송재성

Fabrication of Metal Thin - Film Pressure Sensor and Its Characteristics

Gwiy Sang Chung, Sung Kyu Choi, Hoy Duck Nam, Won Jae Lee, Jae Sung Song

J Electr Electron Mater 2001;14(5):405-409.
Published online: May 1, 2001

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Fabrication of Metal Thin - Film Pressure Sensor and Its Characteristics

J Electr Electron Mater. 2001;14(5):405-409. Published online May 1, 2001

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Fabrication of Metal Thin - Film Pressure Sensor and Its Characteristics

J Electr Electron Mater. 2001;14(5):405-409. Published online May 1, 2001

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센서 , 기능성박막 : 금속박막형 압력센서의 제작과 그 특성

Fabrication of Metal Thin - Film Pressure Sensor and Its Characteristics

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